10⁻⁶ Pa for 8,000 hours
Vacuum cluster transfer arm — bellows coupling
Welded SUS304 bellows coupling for a domestic wafer-cluster handler. Vacuum-tested in-house then shipped sealed. No leakage at 8,000-hour endurance.
Industry · Front-end
Semiconductor Equipment
Vacuum-compatible couplings and clean-environment transmission components for wafer-handling and inspection equipment.
Semiconductor capital equipment has the tightest cleanliness requirements of any industry we serve. Particles measured in nanometers can ruin a wafer worth more than the entire transmission assembly. Every part we ship to this vertical is degreased, electroless-nickel or hard-anodized coated, and packed in cleanroom-friendly packaging.
Last updated Reviewed by Luo Genwen, Production Plant Manager
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Standard finish
Electroless Ni / hard anodize
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Cleanliness
Vacuum-degreased, sealed bag
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Precision
ISO 1328 Class 5
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Bellows couplings
Vacuum-compatible (10⁻⁶ Pa)
What we ship
Parts we make for semiconductor equipment.
Vacuum-compatible bellows couplings
For vacuum-cluster wafer transfer — 10⁻⁶ Pa rated bellows
Wafer-handling timing belt pulleys
Hard-anodized AL7075, custom-bore, sealed packaging
Inspection-stage gear shafts
Class 5 ground, electroless-nickel, encoder-bore concentric
Clean linear gear racks
Stainless racks for atmospheric XY stages
Particle-free locking assemblies
Stainless WK-series, sealed packaging
Wafer-handling robots — both atmospheric and vacuum-cluster — need extremely low-particulate transmission. We ship bellows couplings that hold vacuum, ball-bearing-grade ground shafts with electroless-nickel finish, and hard-anodized aluminum timing belt pulleys for atmospheric stages.
For inspection equipment (lithography stages, wafer-inspection metrology), we ship Class 5 ground gears with bore concentricity ≤ 0.005 mm so the encoder feedback loop sees zero mechanical noise.
Standard packaging is vacuum-degreased, sealed in anti-static bags, lot-coded for incoming QC. We are not a Class-1 cleanroom facility, but we ship parts pre-qualified for downstream cleanroom acceptance.
Products this vertical buys
Linked to full product specs.
Each card opens the product detail page with full capability matrix, materials, and standards.
Stainless gears
SUS440C ground gears with anti-particle surface
View product →Bellows couplings
Vacuum-compatible, 10⁻⁶ Pa rated
View product →Hard-anodized pulleys
AL7075 with Type III anodize, sealed packaging
View product →Stainless racks
Atmospheric XY-stage drives in SUS304 / 420
View product →Stainless locking assemblies
Particle-free, sealed-packaging WK series
View product →Engineering requirements
What makes semiconductor parts different.
Cleanliness
Vacuum-degreased, sealed in anti-static bag, lot-coded
Low-outgas materials
SUS, hard-anodized aluminum, electroless Ni — no painted / oiled surfaces
Vacuum-rated bellows
10⁻⁶ Pa welded bellows couplings for vacuum-cluster handlers
Encoder-grade concentricity
Bore ≤ 0.005 mm to pitch diameter for low-jitter feedback
Particulate report
Surface finish documented; optional ISO 14644-compatible packaging
Customers
Active semiconductor customers.
A selection of internationally known names — the full list lives where it matters, in our shipping records.
Hitachi
Huawei (HiSilicon)
Case studies
Representative outcomes.
Encoder noise floor < 0.5 arc-sec
Inspection-stage gear shafts
Class 5 ground gear shaft with electroless-nickel finish, mounted on a wafer-inspection rotation stage. Customer's encoder integration showed sub-arc-sec noise.
FAQ
Common questions from semiconductor buyers.
Are you a cleanroom-certified supplier?
No — Wolfer is not a Class-1 cleanroom facility. We are an ISO 9001 manufacturer that ships parts pre-qualified for downstream cleanroom acceptance: vacuum-degreased, electroless-nickel or hard-anodized surface, sealed in anti-static bag.
Can you supply vacuum-rated bellows couplings?
Yes. Welded SUS304 or SUS316L bellows, vacuum-tested to 10⁻⁶ Pa in-house before shipment, individually sealed.
Do you offer ISO 14644 packaging?
Standard packaging is vacuum-degreased + sealed anti-static bag — clean enough for most semiconductor-OEM incoming QC. ISO 14644-compatible packaging (specific glove / wipe procedures) is available on request, adds ~1 week to lead time.
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24-hour quote · engineering review within one business day · ≤ 30 days to ship after approval.